Zobrazeno 1 - 10
of 36
pro vyhledávání: '"Alfons Dehe"'
Publikováno v:
Proceedings, Vol 1, Iss 4, p 346 (2017)
We present a physics-based system-level model for optimizing a novel comb-based capacitive MEMS microphone towards high signal-to-noise ratios. The model includes non-linear coupling effects between the electrodes as well as the physical dependencies
Externí odkaz:
https://doaj.org/article/6d3a24da1ce8428db8d280b7d79dd190
Publikováno v:
2022 IEEE Sensors.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b277bcf08660119250f9529e48a48ec4
https://doi.org/10.1109/sensors52175.2022.9967215
https://doi.org/10.1109/sensors52175.2022.9967215
Autor:
Stefan Steckemetz, Vraj Shah, Stephan Knappmann, Andreas Leson, Alfons Dehe, Axel Schumacher, Thorsten Hehn, Erik Pflug, Georg Dietrich
Publikováno v:
Journal of Materials Engineering and Performance
Aim of this work is to improve the bond between a strain sensor and a device on which the strain shall be determined. As strain sensor, a CMOS-integrated chip featuring piezoresistive sensor elements was used which is capable of wireless energy and d
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::5d28a934b38b1d5ee3136d3812bf6c87
http://europepmc.org/articles/PMC8288070
http://europepmc.org/articles/PMC8288070
Publikováno v:
Journal of Microelectromechanical Systems. 30:360-368
This work provides an analytical non-linear model for the capacitive transduction in MEMS transducers with perforated counter-electrodes, especially applicable to capacitive MEMS microphones. Starting from an electrostatic description of a perforated
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a59d77d1fffb5b48a3cb0f1479b62076
https://doi.org/10.1109/jmems.2021.3065129
https://doi.org/10.1109/jmems.2021.3065129
Publikováno v:
2022 Smart Systems Integration (SSI).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::722834bce68ff64f4023262d71ae660e
https://doi.org/10.1109/ssi56489.2022.9901409
https://doi.org/10.1109/ssi56489.2022.9901409
Autor:
Philipp Raimann, Sophie Billat, Irina Spies, Jochen Dietrich, Daniel Hoffmann, Steffen Keller, Alfons Dehe
Publikováno v:
2022 Smart Systems Integration (SSI).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::78a069a2121aee0c2c4459398cc7d9bd
https://doi.org/10.1109/ssi56489.2022.9901417
https://doi.org/10.1109/ssi56489.2022.9901417
Publikováno v:
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::18ed5bc43d1b87c5b8c9ea89367cde7d
https://doi.org/10.1109/mems51670.2022.9699649
https://doi.org/10.1109/mems51670.2022.9699649
Publikováno v:
The Journal of the Acoustical Society of America. 145:968-976
An analytical model is presented that describes the acoustical impedance of cylindrical tubes and concentrically connected systems of such tubes valid up to the ultrasonic application. This allows the evaluation of microsized geometries encountered i
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::a90819c7c2037693f93ca4fbf91b0edc
https://doi.org/10.1121/1.5090502
https://doi.org/10.1121/1.5090502
Publikováno v:
2020 IEEE International Ultrasonics Symposium (IUS).
This work presents a lumped element based model of an airborne capacitive micromachined ultrasonic transducer (CMUT) based on a dual-backplate MEMS technology. The model is derived from analytical equations of a deflected circular membrane and includ
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::43136018efacf196a7489937a2c14726
https://doi.org/10.1109/ius46767.2020.9251571
https://doi.org/10.1109/ius46767.2020.9251571
Autor:
Helena Biegler, Sebastian Nessler, Alfons Dehe, Daniel Krawat, Matthias Dienger, Yiannos Manoli, Jan Rockstroh, Maximilian Marx
Publikováno v:
2019 IEEE SENSORS.
This work presents a 1D-Lorentz force magnetometer embedded in an integrated electromechanical closed-loop readout circuit. The readout circuit tracks the mechanical resonance frequency of the sensor in order to operate it with the highest sensitivit
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::813a6777fef50946b6637c0cfdc8eda0
https://doi.org/10.1109/sensors43011.2019.8956744
https://doi.org/10.1109/sensors43011.2019.8956744