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pro vyhledávání: '"Alexey I. Terentyev"'
Autor:
Alexander N. Saurov, Pavel E. L'vov, S. V. Bulyarskiy, Alexey I. Terentyev, Vyacheslav V. Svetukhin
Publikováno v:
Journal of Vacuum Science & Technology B. 39:064201
We explore the electron beam deposition of cobalt on a silicon substrate. The deposition has been studied in experiments at different electron beam powers. The temperature distribution over the metal surface has been calculated using the stationary h
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::ae945d642785c81e94913cce0b11382b
https://doi.org/10.1116/6.0001223
https://doi.org/10.1116/6.0001223
