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pro vyhledávání: '"Alexei Kobiak"'
Publikováno v:
Optical Interference Coatings.
Single wavelength optical monitoring in intermittent mode was investigated. The achieved coincidence between theory and experiment is outstanding. This monitoring technique enables rapid prototyping with tight specifications and high yield in large b
Publikováno v:
SPIE Proceedings.
The requirements to produce high performance coatings increase dramatically when moving from 248 nm to 193 nm. The quality of DUV thin film components is mainly determined by the optical properties of the applied layer materials. The reduction of los