Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Alexandre Sinding"'
Autor:
Shuangqin Liu, Zouhair Sbiaa, Aveek N. Chatterjee, Hyun-Kee Chang, Alexandre Sinding, Stephen Breit, Ibrahim M. Elfadel, Ilker Ender Ocak, Wajih U. Syed, Jun Yan, Christopher Welham, Arnaud Parent
Publikováno v:
2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
We present the implementation and validation of a novel model for simulating comb squeezed-film damping. The model is computationally efficient regardless of finger count and optionally includes top and bottom encapsulation surfaces surrounding the f
Autor:
Christopher Welham, Wajih U. Syed, Zouhair Sbiaa, Ilker Ender Ocak, Hyun-Kee Chang, Stephen Breit, Jun Yan, Ibrahim M. Elfadel, Alexandre Sinding, Shuangqin Liu, Aveek N. Chatterjee
Publikováno v:
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).
A number of corrections to the well-known squeezed-film gas damping model are required to get accurate results for MEMS. This paper reports on the implementation and validation of a corrected squeezed-film damping (SFD) simulation for common MEMS str