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pro vyhledávání: '"Alexandra Buttimer"'
Autor:
Niall McEvoy, Emma M. Coleman, Paul K. Hurley, Alexandra Buttimer, Lida Ansari, Ian M. Povey, Farzan Gity, Cormac Ó Coileáin, Patrick A. Coleman, Bryan Kelleher, James P. Connolly, Jun Lin, Scott Monaghan
Publikováno v:
Applied Materials Today
A manufacturing-compatible 300 mm chamber reactor for atomic layer deposition or chemical vapour deposition, and pre-fitted with H2/H2S gases that can be uniformly delivered to the wafer surface, is employed to thermally convert Pt to PtS in a H2/H2S
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::c5853651730356c4eefc37cc95e5878c
