Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Alexander V, Rumyantsev"'
Publikováno v:
Beilstein Journal of Nanotechnology, Vol 15, Iss 1, Pp 733-742 (2024)
The evolution of a multilayer sample surface during focused ion beam processing was simulated using the level set method and experimentally studied by milling a silicon dioxide layer covering a crystalline silicon substrate. The simulation took into
Externí odkaz:
https://doaj.org/article/1141814ba2a649f9b28e3c3b6938ddb4
Autor:
Katerina V, Tishakova, Dmitry Yu, Prokopov, Guzel I, Davletshina, Alexander V, Rumyantsev, Patricia C M, O'Brien, Malcolm A, Ferguson-Smith, Massimo, Giovannotti, Artem P, Lisachov, Vladimir A, Trifonov
Publikováno v:
International journal of molecular sciences. 23(24)
The veiled chameleon (
Publikováno v:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 14:956-960
—The atomic structure of crystalline silicon after 5-keV gallium-ion bombardment is investigated using experimental cross-sectional transmission electron microscopy imaging of the irradiated area. Atomistic molecular-dynamics simulations are perfor
Publikováno v:
Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 12:607-612
The processes of redeposited and crystalline silicon sputtering under focused Ga ion-beam irradiation are simulated using the Monte Carlo method and different models of the surface binding energy of Si and Ga atoms. The sputtering yields and the prof
Publikováno v:
Applied Surface Science. 540:148278
Application of ion beams in modern technology requires quantifying disorder induced by the collisions of energetic species and substrate atoms. For studying the structure of the transition region between crystalline silicon and amorphous layer Si(0 0
Publikováno v:
Technical Physics Letters. 41:610-613
The evolution of the surface of a sample under the action of a focused ion beam (FIB) has been simulated using the level set method in the framework of a model that takes into account the redeposition of atoms primarily sputtered by the incident ions
Publikováno v:
Journal of Vacuum Science & Technology B. 36:061802
Successful implementation of focused ion beam technologies in fabrication of practically important structures, including circular holes and trenches requires evaluating the ion dose delivered to the specimen by the beam and subsequently predicting th
Publikováno v:
Materials Research Express. 5:025905
Publikováno v:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena. 34:061803
For applying focused ion beam technologies in fabrication of the predetermined structures it is essential to evaluate the ion dose delivered to the specimen by the beam and on this basis to predict the formed topography. In this article the authors o
Publikováno v:
Materials Research Express; Feb2018, Vol. 5 Issue 2, p1-1, 1p