Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Alexander T. Rakhimov"'
Autor:
Alexey I. Zotovich, Sergey M. Zyryanov, Dmitry V. Lopaev, Askar A. Rezvanov, Ahmed G. Attallah, Maciej O. Liedke, Maik Butterling, Maria A. Bogdanova, Alexey S. Vishnevskiy, Dmitry S. Seregin, Dmitry A. Vorotyntsev, Alexander P. Palov, Eric Hirschmann, Andreas Wagner, Sergej Naumov, Konstantin A. Vorotilov, Tatyana V. Rakhimova, Alexander T. Rakhimov, Mikhail R. Baklanov
Publikováno v:
ACS Applied Electronic Materials. 4:2760-2776
Autor:
Ekaterina N. Voronina, Anastasia A. Sycheva, Alexander A. Solovykh, Olga V. Proshina, Tatyana V. Rakhimova, Alexander A. P. Palov, Alexander T. Rakhimov
Publikováno v:
Journal of Vacuum Science & Technology B. 40:062203
A complex simulation approach is applied to determine optimal conditions for the functionalization of low- k materials in e-beam rf discharge generated by 1 keV electron beam in He. The possibility and mechanisms of methyl group elimination from low-
Autor:
Alexander T. Rakhimov
Publikováno v:
SPIE Proceedings.
New developed emitters guarantee the production of currents form large surfaces with an average current density up to 2.5 A/cm2. Carbon-containing films were manufactured by the method of plasma gas-phase deposition. The structure and emission proper