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pro vyhledávání: '"Alexander S. Perel"'
Autor:
Alexander S. Perel, Wayne LeBlanc, Sporleder David P, Antonella Cucchetti, Bob Lindberg, Morgan McCarty, Chaney Craig R
Publikováno v:
2016 21st International Conference on Ion Implantation Technology (IIT).
Increasing ion source life and output remains a key challenge to improving the productivity and cost of ownership of ion implant tools. This paper describes how recent developments in source design, materials selection, and operation, combined with t
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::33e04bb8f1b80e0f4cc2a2c056ecaf7b
https://doi.org/10.1109/iit.2016.7882847
https://doi.org/10.1109/iit.2016.7882847
Publikováno v:
AIP Conference Proceedings.
Supplying low energy electrons to insure neutralization of implanted wafers requires an advanced charge control system. Some devices are extremely sensitive to low levels of metal contamination. We have designed a radio frequency (rf) plasma flood gu
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a6ee57e6dc070c4c8af4657124225d34
https://doi.org/10.1063/1.2401552
https://doi.org/10.1063/1.2401552
Conference
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