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Publikováno v:
2019 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus).
For implementing high-tech microelectronic production processes, particularly clean conditions are required as determined by technological microclimate. This paper analyzes the thermodynamic efficiency of the research system we make a balance for a s
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a1361f47f22a98a96fd2782b044b3e6c
https://doi.org/10.1109/eiconrus.2019.8657071
https://doi.org/10.1109/eiconrus.2019.8657071
