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pro vyhledávání: '"Alexander N. Kupo"'
Autor:
Alexander N. Kupo, A.S. Rudenkov, Petr A. Luchnikov, Alexander V. Rogachev, Nataliya Chicherina
Publikováno v:
Materials Science Forum. 970:283-289
The effect of the formation and heat treatment modes of silicon-carbon coatings deposited by ion-beam sputtering of silicon carbide on their morphology, chemical and phase composition is determined. It has been established that an increase in the pow