Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Alexander Mikhaylichenko"'
Autor:
Zakhar Vakulov, Daniil Khakhulin, Evgeny Zamburg, Alexander Mikhaylichenko, Vladimir A. Smirnov, Roman Tominov, Viktor S. Klimin, Oleg A. Ageev
Publikováno v:
Materials, Vol 14, Iss 17, p 4854 (2021)
One of the significant limitations of the pulsed laser deposition method in the mass-production-technologies of micro- and nanoelectronic and molecular device electronic fabrication is the issue of ensuring deposition of films with uniform thickness
Externí odkaz:
https://doaj.org/article/ae82604c108d48c49fe9c68846a16126
Autor:
V. S. Klimin, Vladimir A. Smirnov, Z. E. Vakulov, Oleg A. Ageev, Alexander Mikhaylichenko, E. G. Zamburg, D. A. Khakhulin, R. V. Tominov
Publikováno v:
Materials, Vol 14, Iss 4854, p 4854 (2021)
Materials
Volume 14
Issue 17
Materials
Volume 14
Issue 17
One of the significant limitations of the pulsed laser deposition method in the mass-production-technologies of micro- and nanoelectronic and molecular device electronic fabrication is the issue of ensuring deposition of films with uniform thickness