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pro vyhledávání: '"Alexander Mühlig"'
Autor:
Frank Riedel, Bastian Troger, Thomas Fries, Martin Schellenberger, Alexander Mühlig, Dirk Lewke, Stefan Bauer, Hubert Wihr
Publikováno v:
Key Engineering Materials. 613:87-93
Leading edge lithography processes require silicon wafers of nearly perfect flatness. In order to improve wafer manufacturing processes as well as the wafer quality, already early manufacturing processes like grinding and lapping have to be monitored
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0d0707f8c21c909b11cbe42883f11abb
https://doi.org/10.4028/www.scientific.net/kem.613.87
https://doi.org/10.4028/www.scientific.net/kem.613.87
