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of 3
pro vyhledávání: '"Alexander Mühlig"'
Autor:
Frank Riedel, Bastian Troger, Thomas Fries, Martin Schellenberger, Alexander Mühlig, Dirk Lewke, Stefan Bauer, Hubert Wihr
Publikováno v:
Key Engineering Materials. 613:87-93
Leading edge lithography processes require silicon wafers of nearly perfect flatness. In order to improve wafer manufacturing processes as well as the wafer quality, already early manufacturing processes like grinding and lapping have to be monitored
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::0d0707f8c21c909b11cbe42883f11abb
https://doi.org/10.4028/www.scientific.net/kem.613.87
https://doi.org/10.4028/www.scientific.net/kem.613.87
Autor:
Robert H. Schmitt, Harald Bosse
Selected, peer reviewed papers from the 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2013), July 1-3, 2013, Aachen, Germany
Autor:
Ira A. Glazier, William P. Filby
Germans to America provides both genealogists and researchers of family history with the first extensive, indexed source of German-surname immigrants who came to all ports in the United States between 1850 and 1893. This period witnessed one of the h