Zobrazeno 1 - 1
of 1
pro vyhledávání: '"Alexander Korchemagin"'
Publikováno v:
Engineering Proceedings, Vol 58, Iss 1, p 2 (2023)
The gas-sensitive properties of thin films of β-Ga2O3 deposited via RF magnetron sputtering while heating the substrate to 650 °C were studied. Some of the samples were subjected to additional high-temperature annealing at a temperature of 900 °C.
Externí odkaz:
https://doaj.org/article/e1c406214c8e4bd48b93bdaa62c1b44f
