Zobrazeno 1 - 4
of 4
pro vyhledávání: '"Alexander Henstra"'
Autor:
Marcel Niestadt, Bert Freitag, Eric Van Cappellen, Peter Hartel, Peter Tiemeijer, Christian Maunders, Alexander Henstra, Maarten Bischoff, Veli Altin
Publikováno v:
Microscopy and Microanalysis. 24:1134-1135
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::4fd63590415d2bc06482d54d1ea5590c
https://doi.org/10.1017/s1431927618006153
https://doi.org/10.1017/s1431927618006153
Publikováno v:
Low Voltage Electron Microscopy: Principles and Applications
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::b5aae03ef32a1abdbd0656f2fa9078b4
https://doi.org/10.1002/9781118498514.ch3
https://doi.org/10.1002/9781118498514.ch3
Publikováno v:
Microscopy and Microanalysis. 15:168-169
Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::fc03d76983592ddf44befee29350118e
https://doi.org/10.1017/s1431927609096147
https://doi.org/10.1017/s1431927609096147
Autor:
Alexander Henstra, James J. Jackman
Publikováno v:
SPIE Proceedings.
To evaluate the rigorousness of existing algorithms for critical dimension (CD) linewidth measurements in the SEM, a Monte Carlo program was developed to model the topographic signal of line-and-space patterns for both backscattered and secondary ele
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::a86e7d49c051bb152dbd0884fdbd0534
https://doi.org/10.1117/12.174168
https://doi.org/10.1117/12.174168