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pro vyhledávání: '"Alexander Dipl.-Ing. Bayer"'
Autor:
Jens Holtkamp, Lüdger Bosse, Alexander Olowinsky, Kilian Klages, Jens Gedicke, Claudia Hartmann, Arnold Gillner, Alexander Dipl.-Ing. Bayer
Publikováno v:
Journal of Materials Processing Technology. 167:494-498
The production and machining of micro parts were in the past mainly made by technologies developed from the electronic industry, which is particularly based on silicon etching technologies for the production of, e.g., sensor elements. Due to the incr
Publikováno v:
Fourth International Symposium on Laser Precision Microfabrication.
Modern metal forming technologies enable the mass-production of smallest parts for micro-technical applications. The future trend is to manufacture more complex parts at a high level of economic efficiency and precision. A common method to enhance th
Publikováno v:
SPIE Proceedings.
The manufacturing of micro parts is mainly done in silicon, where manufacturing technologies from electronic production can be used. In cases, where the mechanical and structural properties of silicon are not sufficient or the costs of silicon micro