Zobrazeno 1 - 1
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pro vyhledávání: '"Alexander A. Solovykh"'
Autor:
Ekaterina N. Voronina, Anastasia A. Sycheva, Alexander A. Solovykh, Olga V. Proshina, Tatyana V. Rakhimova, Alexander A. P. Palov, Alexander T. Rakhimov
Publikováno v:
Journal of Vacuum Science & Technology B. 40:062203
A complex simulation approach is applied to determine optimal conditions for the functionalization of low- k materials in e-beam rf discharge generated by 1 keV electron beam in He. The possibility and mechanisms of methyl group elimination from low-
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e1c4b5eaab6b00be9527ec7cc70fba16
https://doi.org/10.1116/6.0002006
https://doi.org/10.1116/6.0002006
