Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Alexander A. Solovykh"'
Autor:
Ekaterina N. Voronina, Anastasia A. Sycheva, Alexander A. Solovykh, Olga V. Proshina, Tatyana V. Rakhimova, Alexander A. P. Palov, Alexander T. Rakhimov
Publikováno v:
Journal of Vacuum Science & Technology B. 40:062203
A complex simulation approach is applied to determine optimal conditions for the functionalization of low- k materials in e-beam rf discharge generated by 1 keV electron beam in He. The possibility and mechanisms of methyl group elimination from low-
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::e1c4b5eaab6b00be9527ec7cc70fba16
https://doi.org/10.1116/6.0002006
https://doi.org/10.1116/6.0002006
Autor:
Voronina, Ekaterina N., Sycheva, Anastasia A., Solovykh, Alexander A., Proshina, Olga V., Rakhimova, Tatyana V., Palov, Alexander A. P., Rakhimov, Alexander T.
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Dec2022, Vol. 40 Issue 6, p1-14, 14p