Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Alex Mutale"'
Publikováno v:
Journal of Materials Science: Materials in Electronics. 31:9044-9051
In this study, we investigated the effects of applied voltage and frequencies on the electrical properties of Al/(Er2O3(150 nm)/SiO2(20 nm)/n-Si)/Al MOS capacitor. The e-beam deposited Er2O3/SiO2 films were annealed at 650 °C in N2 ambient and the c
Publikováno v:
RAP Conference Proceedings.
Publikováno v:
RAP Conference Proceedings.
Publikováno v:
Radiation Physics and Chemistry. 196:110138
Autor:
Alex Mutale, Ercan Yilmaz
Publikováno v:
RAP Conference Proceedings.
Autor:
Ercan Yilmaz, Alex Mutale
Publikováno v:
RAP Conference Proceedings.
Publikováno v:
RAP 2019 Conference Proceedings.
Effect of annealing temperature on the electrical characteristics of Al/Er2O3/n-Si/Al MOS capacitors
Publikováno v:
Journal of Alloys and Compounds. 863:158718
In this work, Er2O3 films deposited by electron beam (E-beam) evaporation technique were annealed at 450 °C, 550 °C, and 650 °C in N2 atmosphere for 30 min. We then compared the electrical properties, the frequency dependency of the density of int