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pro vyhledávání: '"Alex L. Barros"'
Publikováno v:
Journal of Integrated Circuits and Systems. 3:97-103
This paper describes a simple method to fabricate silicon microtips with integrated self-aligned polarization electrodes for development of MEMS and electron field emission devices. The method is based on the wet bulk micromachining of the silicon su
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::11cce5d6b3ab6ce7a885107ea890f58a
https://doi.org/10.29292/jics.v3i2.288
https://doi.org/10.29292/jics.v3i2.288
