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Publikováno v:
2017 IEEE Conference of Russian Young Researchers in Electrical and Electronic Engineering (EIConRus).
The layer-by-layer deposition technique for metal oxide thin films from solutions of complex compounds is proposed and considered by examples of copper and titanium oxides from ammonia copper and titanium citrate-peroxide complexes as sources respect
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d13ea9e82a01916889eb87c3cad9df44
https://doi.org/10.1109/eiconrus.2017.7910836
https://doi.org/10.1109/eiconrus.2017.7910836
