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pro vyhledávání: '"Aleksey S. Kozhechenko"'
Autor:
Aleksey V. Shcherbakov, Daria A. Gaponova, Aleksey S. Kozhechenko, Nru Mpei, Regina V. Rodyakina
Publikováno v:
Vestnik MEI. 2:72-79
The importance of developing an automated technique for measuring spatial current density distributions of process electron beams is shown. It has been proven that immediate methods based on directly measuring the electron beam current components are