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pro vyhledávání: '"Aleksandr G. Plekhanov"'
Autor:
Svetlana V. Belaya, Eugene A. Maksimovsky, Vladimir R. Shayapov, Aleksandra A. Shapovalova, Alexey N. Kolodin, Andrey A. Saraev, Igor P. Asanov, Maxim N. Khomyakov, Irina V. Yushina, Aleksandr G. Plekhanov, Veronica S. Sulyaeva, Marina L. Kosinova
Publikováno v:
Applied Sciences, Vol 13, Iss 8, p 4959 (2023)
This study reports the chemical vapor deposition of amorphous boron carbonitride films on Si(100) and SiO2 substrates using a trimethylamine borane and nitrogen mixture. BCxNy films with different compositions were produced via variations in substrat
Externí odkaz:
https://doaj.org/article/47e26a87db924d7593de8627762b533e
