Characterization of PillarHall test chip structures using a reflectometry technique

Autor: Aleksandr Aleksandrovich Danilenko, Masoud Rastgou, Farshid Manoocheri, Jussi Kinnunen, Virpi Korpelainen, Antti Lassila, Erkki Ikonen

Publikováno v: Danilenko, A, Rastgou, M, Manoocheri, F, Kinnunen, J, Korpelainen, V, Lassila, A & Ikonen, E 2023, ' Characterization of PillarHall test chip structures using a reflectometry technique ', Measurement Science and Technology, vol. 34, no. 9, 094006 . https://doi.org/10.1088/1361-6501/acda54

Thin film samples where one of the thin layers consists of vacuum or air are called PillarHalls due to their support structure in silicon wafers. Custom PillarHall samples were provided by manufacturer and characterized by reflectometry with spectrom

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https://cris.vtt.fi/en/publications/31675d25-26e3-42c8-90bc-185a4ce6f009