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pro vyhledávání: '"Aleksander Nikonov"'
Autor:
Elena Kralkina, Aleksander Nikonov, P.A. Nekludova, Ilya Zadiriev, Konstantin Vavilin, Vladimir Tarakanov
Publikováno v:
Plasma Sources Science and Technology. 30:115020
Systematic experimental studies of the electron density and temperature, the efficiency of RF power coupling to the RF inductive discharge plasma have been carried out in the pressure range of helium, neon, argon, and krypton 0.1–133 Pa, at an RF g
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1c0db04103447d4f200ad833c4b1f7e5
https://doi.org/10.1088/1361-6595/ac331a
https://doi.org/10.1088/1361-6595/ac331a
