Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Aldrice Bakouboula"'
Autor:
Isabelle Sagnes, F. Riemenschneider, Philippe Regreny, Sophie Bouchoule, Martin Strassner, Jean-Louis Leclerq, Peter Meissner, Aldrice Bakouboula
Publikováno v:
Comptes Rendus Physique. 4:675-685
We report on the design, fabrication and characteristics of both hybrid and monolithic micro-electro-mechanically wavelength tunable 1.55 μm InP-based Vertical-Cavity Surface-Emitting Laser (VCSEL) structures. Photo-pumped tunable VCSELs are success
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::208c96d779cd5a978522db5158a958ef
https://doi.org/10.1016/s1631-0705(03)00082-3
https://doi.org/10.1016/s1631-0705(03)00082-3
Autor:
Aldrice Bakouboula, Peter Choi, S. V. Zakharov, Keith Powell, Otman Benali, Wafa Kezzar, V. S. Zakharov, Jeremy Bastide, Edmund Wyndham, Grainne Duffy, Michèle Cau, R. Aliaga-Rossel, Clement Zaepffel, Blair Lebert, Ouassima Sarroukh, Philippe Bove, Luc Tantart
Publikováno v:
SPIE Proceedings.
EUV sources for actinic mask metrology, particularly for defect inspection, require extremely high brightness. The selfabsorption of radiation limits the in-band EUV radiance of the source plasma and makes it difficult to attain the necessary brightn
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::84996c2ed4a356198d3e4bee09cd73d7
https://doi.org/10.1117/12.848477
https://doi.org/10.1117/12.848477
Autor:
Peter Choi, Grainne Duffy, Aldrice Bakouboula, Osamu Iwase, R. Aliaga-Rossel, S. V. Zakharov, Ouassima Sarroukh, Clement Zaepffel, Blair Lebert, Otman Benali, Keith Powell, Philippe Bove, Michèle Cau, V. S. Zakharov
Publikováno v:
Journal of Micro/Nanolithography, MEMS, and MOEMS. 11:021107-1
Actinic mask defect inspection and metrology requires high-brightness extreme-ultraviolet (EUV) sources. The self-absorption of radiation limits the in-band EUV radiance of the source plasma and makes it difficult to attain the necessary brightness a
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::7191f55cf00a0cb4d3a32dd0d36f032b
https://doi.org/10.1117/1.jmm.11.2.021107
https://doi.org/10.1117/1.jmm.11.2.021107