Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Albert Franzi"'
Autor:
Albert Franzi, Justin Bitner, Christian Fifield, Eugene Y. Ngai, Kevin M. Prettyman, William Jordon, John Marci, Nicholas Ferrera, Jennyfer Chacon, Mo-Geng Chin, Trevor Szekeres, Jason Baylor, Thanh-Trung Nguyen, Yu-Jhen Lin, Jenq-Renn Chen, Hsiao-Yun Tsai, Cheng-Chieh Wang
Publikováno v:
Journal of Loss Prevention in the Process Industries. 65:104127
This work aims to characterize and develop a disposal method for a gel-like deposit generated in a vacuum foreline of an atomic layer deposition (ALD) tool that is using hexachlorodisilane (Si2Cl6, HCDS) as a precursor. This ALD foreline gel was repr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::acca58839a8d1d6c4fca1ab7a3fb6626
https://doi.org/10.1016/j.jlp.2020.104127
https://doi.org/10.1016/j.jlp.2020.104127
Publikováno v:
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::579efd42df1869698d006dec8009a063
https://doi.org/10.1109/asmc.2017.7969264
https://doi.org/10.1109/asmc.2017.7969264