Výsledky vyhledávání - "Alan M. Gundlach"

Test Structures for the Characterization of MEMS and CMOS Integration Technology

Autor: Andrew Bunting, H. Lin, Anthony J. Walton, Stewart Smith, Alan M. Gundlach, J.T.M. Stevenson, Camelia Dunare

Publikováno v: IEEE Transactions on Semiconductor Manufacturing. 21:140-147

Test structures have been used to study the feasibility of bonding MEMS to CMOS wafers to create an integrated system. This involves bonding of prefabricated wafers and creating interconnects between the bonded wafers. Bonding of prefabricated wafers

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a08f3ababc67908e4c33d6eb9c7094ae
https://doi.org/10.1109/tsm.2008.2000274

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Calibration of MEMS-based test structures for predicting thermomechanical stress in integrated circuit interconnect structures

Autor: Steve Bull, Nicholas G. Wright, Kai Wang, S.M. Soare, J.M.M. dos-Santos, Jonathan G. Terry, J.T.M. Stevenson, Alton B. Horsfall, Anthony O'Neill, Anthony J. Walton, Alan M. Gundlach, J.C.P. Pina

Publikováno v: IEEE Transactions on Device and Materials Reliability. 5:713-719

This paper uses a rotating-beam-sensor structure to show that the extrinsic stress from the mismatch in expansion coefficient between the aluminum and the silicon substrate dominates over the compressive stress from the sputter growth. Sintering the

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::8bf871081bdb24841a6580b4940b9eb0
https://doi.org/10.1109/tdmr.2005.857218

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Sensitivity of a Rotating Beam Sensor for Stress Evaluation in Aluminium Thin Films

Autor: S.M. Soare, Anthony O'Neill, Jonathan G. Terry, J.C.P. Pina, J.M.M. dos Santos, Alton B. Horsfall, Steve Bull, Anthony Walton, Alan M. Gundlach, Kai Wang, António Castanhola Batista, J.T.M. Stevenson, Nicolas G. Wright

Publikováno v: Materials Science Forum. :649-654

The evaluation of stress in sub-micron tracks is critical for the microelectronics industry and there is a need for new methods of measurement. This paper advocates the use of a rotating beam sensor structure which can be fabricated on the wafer alon

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::b15d348dbb4fbad7648f5f62d371846f
https://doi.org/10.4028/www.scientific.net/msf.490-491.649

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Test Chip for the Development and Evaluation of Sensors for Measuring Stress in Metal Interconnects

Autor: Stewart Smith, S.M. Soare, Steve Bull, Jonathan G. Terry, Nicholas G. Wright, Kai Wang, Anthony O'Neill, Alton B. Horsfall, J.M.M. dos Santos, J.T.M. Stevenson, Anthony J. Walton, Alan M. Gundlach

Publikováno v: IEEE Transactions on Semiconductor Manufacturing. 18:255-261

The development of a new test chip is presented, containing structures for the direct measurement of stress in metallic interconnect layers associated with silicon integrated circuit technology. The rotation of the structures provides a simple method

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::a9e1ad989db22149b22de4903771f6f5
https://doi.org/10.1109/tsm.2005.845096

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Prototype detector technology for the SCUBA-2 submillimetre bolometer array

Autor: Camelia Dunare, Kent D. Irwin, Wayne S. Holland, Andrew Bunting, Adam Woodcraft, H. McGregor, Stewart Smith, Anthony J. Walton, P. A. R. Ade, R. V. Sudiwala, Eric F Schulte, William Parkes, Joel N. Ullom, J.T.M. Stevenson, William Duncan, Alan M. Gundlach, Michael D. Audley, Gene C. Hilton, Jonathan G. Terry

Publikováno v: Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems. 219:11-21

This paper reports the latest design and the associated fabrication technology of the Mk II prototype infrared (IR) detector for the two 5120 pixel SCUBA-2 (submillimetre common user bolometer arry) instruments, which are to be mounted on the James C

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::7e19b34d8bd4439bb45b752607c36a3a
https://doi.org/10.1243/174034905x77337

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Dependence of Process Parameters on Stress Generation in Aluminum Thin Films

Autor: J.M.M. dos-Santos, Jonathan G. Terry, Nicholas G. Wright, Anthony O'Neill, Kai Wang, Alan M. Gundlach, J.T.M. Stevenson, Anthony J. Walton, Steve Bull, S.M. Soare, Alton B. Horsfall

Publikováno v: IEEE Transactions on Device and Materials Reliability. 4:482-487

The dependence of residual stress on the process parameters for aluminum metallization has been studied using a rotating beam sensor. This shows increasing tensile stress with both the target power and ambient pressure used during the sputter deposit

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::85ae20351b2f2e9084e2daca8d7eab52
https://doi.org/10.1109/tdmr.2004.829389

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SCUBA-2 arrays to system interfaces

Publikováno v: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 520:427-430

Submillimeter common user bolometer array (SCUBA)-2 is a wide field sub-mm bolometer camera designed to replace the existing SCUBA instrument on the JCMT in Hawaii. It will be many hundreds of times faster in large area mapping than SCUBA and will al

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::f5f475060bc44b48c462ffdf647756a9
https://doi.org/10.1016/j.nima.2003.11.355

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Design and fabrication of the detector technology for SCUBA-2

Autor: R. Sudiwala, Peter A. R. Ade, Kent D. Irwin, Wayne S. Holland, J.T.M. Stevenson, Gene C. Hilton, W. D. Duncan, Anthony J. Walton, Eric F Schulte, William Parkes, Michael D. Audley, Jonathan G. Terry, Joel N. Ullom, Alan M. Gundlach, Camelia Dunare

Publikováno v: IEE Proceedings - Science, Measurement and Technology. 151:110-120

The design and fabrication is described of the prototype IR detector for the SCUBA-2 80×80 pixel array (Submillimetre Common User Bolometer Array), which is to be mounted on the James Clerk Maxwell Telescope in Hawaii. The detector technology is bas

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::ce20c00f3b3da9f31c912587c8445862
https://doi.org/10.1049/ip-smt:20040088

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