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pro vyhledávání: '"Alan L. Levine"'
Autor:
Alan L. Levine, Albert S. Bergendahl
Publikováno v:
SPIE Proceedings.
Cost of ownership modeling is a critical and emerging tool that provides significant insight into the ways to optimize device manufacturing costs. The development of a model to deal with a particular application, mix-and-match lithography, was perfor
Publikováno v:
SPIE Proceedings.
This paper describes a high-leverage cost-reduction methodology -- advanced mix-and-match lithography. Quantifying the areas of cost savings and cost of ownership is essential in determining the optimum mix-and-match approach. Cost of ownership, usin
Autor:
William H Arnold, Alan L Levine
Publikováno v:
SPIE Proceedings.
The fabrication of very large scale integrated circuits, usually done on silicon substrates known as wafers, is a process by which successive layers of films are deposited and patterned. Photolithographic transfer of patterned images is performed fEo