Zobrazeno 1 - 1
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pro vyhledávání: '"Alan J. Wickstrom"'
Autor:
H. Christopher Hamaker, Robert Kiefer, Michael E. Ungureit, Boaz Kenan, Alan J. Wickstrom, Sam C. Howells, Michael Bohan, Curt Jackson, Eric R. Christenson, Malik K. Sadiq, Peter Pirogovsky, Paul C. Allen, Robin Teitzel, Michael White
Publikováno v:
SPIE Proceedings.
The capability of the DUV ALTAO 4300 system has been extended by the development of two new optical subsystems: a 0.9 NA, 42X reduction lens and a high-bandwidth acousto-optic deflector based beam position and intensity correction servo. The PSM over
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5091775115dc2dd91594577b4fbe8093
https://doi.org/10.1117/12.570291
https://doi.org/10.1117/12.570291
