Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Alan Gott"'
Autor:
Alan Gott, Evgeny Zhirnov, N. I. Bochkareva, Wang Nang Wang, Yu. G. Shreter, Sergei Stepanov, D. V. Tarkhin
Publikováno v:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 23:687-692
ICP etching of GaN, Al0.1Ga0.9N, and a laser diode (LD) structure with Cl2–Ar plasma assisted by Si coverplate material was systematically studied. The influence of the process pressure, rf and ICP power on the etch rate, surface morphology, and se
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::290d2aab1934dfd0e949e4903b41f371
https://doi.org/10.1116/1.1914812
https://doi.org/10.1116/1.1914812
Autor:
Duncan W. E. Allsopp, Wang Nang Wang, Alan Gott, Philip A. Shields, Somyod Denchitcharoen, Chaowang Liu
Publikováno v:
physica status solidi c. 6
Nano-pendeo-epitaxial GaN films have been grown by metalorganic vapour phase epitaxy on nanocolumns fabricated on thin GaN-on-Si(111) templates. Optical and structural performances of the films are improved, crack densities are reduced, and self-sepa
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::406c82dc78aa601088778f0f3a4cd07c
https://doi.org/10.1002/pssc.200880801
https://doi.org/10.1002/pssc.200880801