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pro vyhledávání: '"Alain Fourrier"'
Autor:
Alain Fourrier, Jean-Alain Jouan
Publikováno v:
SAE Technical Paper Series.
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::1ef2461131af41c4f331320c43579975
https://doi.org/10.4271/901986
https://doi.org/10.4271/901986
Publikováno v:
Japanese Journal of Applied Physics. 30:1469
Optical properties and mechanical stress of silicon nitride films deposited at room temperature by ion-beam sputtering are studied for various compositions in the range of N/Si=0.6 to N/Si=1.4. The refractive index and mechanical stress are investiga
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::66711df9e5a145ead5186a974f736022
https://doi.org/10.1143/jjap.30.1469
https://doi.org/10.1143/jjap.30.1469