Zobrazeno 1 - 10
of 10
pro vyhledávání: '"Al. V. Bykov"'
Autor:
Al. V. Bykov, M. V. Il’ina, Oleg A. Ageev, Vladimir A. Smirnov, R. V. Tominov, N. I. Alyab’eva, V. V. Polyakova
Publikováno v:
Technical Physics. 63:1236-1241
The surface of silicon substrates has been studied experimentally and theoretically by the method of atomic force microscopy spreading resistance imaging, and measuring techniques for the spreading resistance of semiconductors have been developed bas
Autor:
Al. V. Bykov, Oleg A. Ageev, A. S. Kolomiytsev, S. A. Lisitsyn, Boris G. Konoplev, M. V. Il’ina, O. I. Il’in
Publikováno v:
Russian Microelectronics. 46:468-473
The results of experimental studies of the Pt structure with the thickness ranging from (0.48 ± 0.1) to (24.38 ± 0.1) nm ion beam including deposition by focused ion beam are presented. The rate of ion beam including deposition of Pt, which dependi
Autor:
Oleg A. Ageev, A. S. Kolomiitsev, Vladimir A. Smirnov, Boris G. Konoplev, Al. V. Bykov, O. G. Tsukanova, M. V. Rubashkina
Publikováno v:
Semiconductors. 49:1743-1748
The results of an experimental study of the modification of probes for critical-dimension atomicforce microscopy (CD-AFM) by the deposition of carbon nanotubes (CNTs) to improve the accuracy with which the surface roughness of vertical walls is deter
Publikováno v:
Microelectronics Reliability. 55:2131-2134
In this work the results of experimental studies of a fabrication of advanced probes for Atomic Force Microscopy (AFM) using Focused Ion Beam (FIB) and nanolithography are reported. Ability to restore the functionality of broken AFM probe tips is sho
Autor:
A. A. Fedotov, J Y Jityaeva, O. I. Il’in, E. G. Zamburg, M. S. Solodovnik, E Yu Gusev, A. S. Kolomiytsev, M. V. Il’ina, S. V. Balakirev, Vladimir A. Smirnov, Boris G. Konoplev, S. U. Krasnoborodko, Al. V. Bykov, V. V. Polyakov, Oleg A. Ageev
Publikováno v:
Springer Proceedings in Physics ISBN: 9783319263229
The results of experimental researches of the geometrical parameters of vertically aligned carbon nanotubes (VACNTs) are present by atomic force microscopy. The analysis of the applicability of the different AFM modes to determine the geometrical par
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6d2f034596820b7407762fdaeb476035
https://doi.org/10.1007/978-3-319-26324-3_40
https://doi.org/10.1007/978-3-319-26324-3_40
Publikováno v:
Journal of Physics: Conference Series. 929:012055
Publikováno v:
Journal of Physics: Conference Series. 741:012177
The two-layer polysilicon surface micromachining process flow of nanomechanical accelerometerincluded a high aspect-ratio etch step was presented.In the experiments we defined modes, and developed the technology of tunnelling gap formation using focu
Publikováno v:
Journal of Physics: Conference Series. 741:012001
Grain size effect on microhardness and Young modulus of polysilicon layers was obtained by nanoindentation experiments: 14.1-16.3 GPa and 240-300 GPa, respectively, for the particle-diameter of 117-430 nm. The range of grain size correlated to mechan
Publikováno v:
Journal of Physics: Conference Series; 2017, Vol. 929 Issue 1, p1-1, 1p
Publikováno v:
Journal of Physics: Conference Series; 2016, Vol. 741 Issue 1, p1-1, 1p