Zobrazeno 1 - 3
of 3
pro vyhledávání: '"Akiyoshi Mitsumori"'
Publikováno v:
Japanese Journal of Applied Physics. 55:056501
To investigate the similarity and difference of substrate conduction type in the time-dependent dielectric breakdown (TDDB) tests for the barrier integrity against Cu diffusion under bias-temperature stress (BTS), the TDDB reliability of electroless
Publikováno v:
Japanese Journal of Applied Physics. 51:05EB03
Barrier integrity of electroless NiB and CoWP/NiB thin layers against copper (Cu) diffusion was evaluated by time-dependent dielectric breakdown (TDDB) under bias temperature stress (BTS) using metal oxide semiconductor (MOS) test structures. The BTS
Publikováno v:
Japanese Journal of Applied Physics; May2016, Vol. 55 Issue 5, p1-1, 1p