Výsledky vyhledávání - "Akis Dagonis"

4K-cells Resistive and Charge-Base-Capacitive Measurement Test Structure Array (R-CBCM-TSA) for CMOS Logic Process Development, Monitor and Model

Autor: Shyue-Shyh Lin, H.C. Tseng, S. Pan, Keh-Jeng Chang, Akis Dagonis, Kelvin Doong

Publikováno v: 2009 IEEE International Conference on Microelectronic Test Structures.

To maximize the design efficiency of the test chip area and maintain the high accuracy measurement requirement of resistors and capacitors, a 4K-cells resistive and charge-base capacitive test structure array is designed for CMOS logic process develo

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::fc4a7da7050da2eebcc0d8e0e8b79f1d
https://doi.org/10.1109/icmts.2009.4814645

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