Výsledky vyhledávání - "Akihiro Inouye"

Investigation of Thin Film Deposited by Photo Enhanced Chemical Vapor Deposition with Vacuum Ultra Violet as a Light Source using Tetraethoxysilane

Autor: Akihiro Inouye, Naohiro Horii, Hiroki Nishibata, Kunio Okimura

Publikováno v: SHINKU. 44:1018-1022

Thin films have been deposited by photo assisted chemical vapor deposition with Xe2 excimer lamp as a vacuum UV (VUV) source using Tetraethoxysilane (TEOS) as an organic silicon source. A chemical stability of films exposed to in atmospheric conditio

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::2c9dae935d62fc62866c92c79c573aeb
https://doi.org/10.3131/jvsj.44.1018

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Crystallization of silica glass upon heating by contact with a NaCl crystal grain

Autor: Mitsuru Kamide, Naohiro Horii, Nobu Kuzuu, Akihiro Inouye

Publikováno v: Journal of the Ceramic Society of Japan. 118:318-320

Silica glass might be crystallized from the surface under existence of contaminants such as alkali metal compounds at high temperatures.1) The crystallization of glass from the surface upon heating is called devitrification. Devitrification of silica

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::668d3fbf7686c8c0ca9fa4fe884ce19b
https://doi.org/10.2109/jcersj2.118.318

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Photochemical Dissociation of Organic Silicon Source using Xe2 Excimer Lamp in Gas Phase

Autor: Kunio Okimura, Akihiro Inouye, Naohiro Horii

Publikováno v: SHINKU. 43:288-291

Photochemical dissociation of Tetraethoxysilane (TEOS) used as an organic silicon source in the gas phase was investigated by in-situ mass spectrometry. The vacuum uliraviolet (VUV) sources for inducing photochemical reaction were Xe2 excimer lamp (1

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_________::72082845655cadff4d80df13707a8968
https://doi.org/10.3131/jvsj.43.288

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