Zobrazeno 1 - 10
of 13
pro vyhledávání: '"Akihide Kimura"'
Publikováno v:
Precision Engineering. 36:576-585
A three-axis surface encoder was developed for stage motion measurement with sub-nanometric resolutions. The surface encoder was composed of a scale XY planar grating with X- and Y-directional periodic grating structures and an optical sensor head fo
Publikováno v:
International Journal of Precision Engineering and Manufacturing. 13:1517-1524
A reflective-type linear scale with a pitch of 1.67 μm used in an interferential scanning-type 2-DOF linear encoder is evaluated by the Fizeau interferometer with a measurement range of 100 mm. The 2-DOF linear encoder produces 2-axis position signa
Publikováno v:
International Journal of Automation Technology. 5:91-96
The surface encoder we propose for simultaneously measuring XYZ-directional displacements consists of a XY-axis with a scale grating and an optical sensor head. The XY-axis scale grating size determines the surface encoder’s measurement range in pl
Publikováno v:
Precision Engineering. 34:145-155
This paper presents a two-degree-of-freedom (two-DOF) linear encoder which can measure the position along the moving axis (X-axis) and the straightness along the axis vertical to the moving axis (Z-axis) of a precision linear stage simultaneously. Th
Autor:
Akihide Kimura, Wei Gao
Publikováno v:
Journal of the Japan Society for Precision Engineering. 76:759-762
Publikováno v:
Journal of the Japan Society for Precision Engineering. 74:976-980
Publikováno v:
Journal of the Japan Society for Precision Engineering, Contributed Papers. 72:382-386
This paper describes a new type of surface encoder for planar position measurement, which consists of a sinusoidal grid (target sine-grid) and an optical sensor unit. The optical sensor employs a transparent sine-grid instead of a grid pattern film u
Autor:
Akihide, KIMURA, Kimihiro, MATSUNAGA
Publikováno v:
摂南大学教育学研究. 2:47-61
教育メディアとしてのシミュレーションは、コンピュータ上に学習対象のモデルが構築され、学習者が自由に操作し、システムの応答から学習者が自主的に学習するように設計された学
Publikováno v:
SPIE Proceedings.
This paper describes the replication of a precision sinusoidal grid surface, which is used as the measurement reference of a surface encoder for measurement of planar motions. The profile of the grid surface is a superposition of sinusoidal waves in
Publikováno v:
The Proceedings of Conference of Tohoku Branch. :178-179