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pro vyhledávání: '"Akifumi Moroki"'
Publikováno v:
Japanese Journal of Applied Physics. 44:8753
We have studied femtosecond laser processing using subwavelength thin metal slits patterned onto Si substrates. A thin Ta film (200 nm thickness) with a periodic-structured slit array (200–1000 nm width) was formed on the Si substrates. The ablatio
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::6f5d84f990592aed9ba90712a86febde
https://doi.org/10.1143/jjap.44.8753
https://doi.org/10.1143/jjap.44.8753
