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Autor:
Rosfariza Radzali, N. S. M. Razali, Yusnita Mohd Ali, Alhan Farhanah Abd Rahim, Ainorkhilah Mahmood, Ahmad Sabirin Zoolfakar, Aida Azrenda Mustakim
Publikováno v:
Microelectronics International. 37:46-53
Purpose Porous silicon (PS) was successfully fabricated using an alternating current photo-assisted electrochemical etching (ACPEC) technique. This study aims to compare the effect of different crystal orientation of Si n(100) and n(111) on the struc