Development of All-Around SiO2/Al2O3 Gate, Suspended Silicon Nanowire Chemical Field Effect Transistors Si-nw-ChemFET

Autor: Ahmet Lale, Auriane Grappin, Laurent Mazenq, David Bourrier, Aurélie Lecestre, Jérôme Launay, Pierre Temple-Boyer

Publikováno v: Proceedings, Vol 1, Iss 4, p 419 (2017)

We present a sensor platform associated to silicon-nanowire chemical field effect transistors (Si-nw-ChemFET). Innovations concern the use of networks of suspended silicon N+/P/N+ nanowires as conducting channel, the realization by thermal oxidation

Externí odkaz: https://doaj.org/article/64b1862e32fa45f196fa011075eabc3e

Effect of thermal annealing on the dielectric, passivation and pH detection properties of aluminium oxide thin films deposited by plasma-enhanced atomic layer deposition

Autor: Pierre Temple-Boyer, Emmanuel Scheid, Ahmet Lale, Samir Mekkaoui, Xavier Joly, Jérôme Launay, Matthieu Joly

Publikováno v: Thin Solid Films
Thin Solid Films, Elsevier, 2021, 732, pp.138761. ⟨10.1016/j.tsf.2021.138761⟩
Thin Solid Films, 2021, 732, pp.138761. ⟨10.1016/j.tsf.2021.138761⟩

International audience; The dielectric properties of aluminium oxide (Al2O3) thin films obtained by plasma-enhanced atomic layer deposition (PEALD) from Al(CH3)3/O2 precursors were investigated while focusing on the influences of thermal annealing un

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::d42b50c63831c2daa46d5b5102449967
https://hal.laas.fr/hal-03380757

Study of aluminium oxide thin films deposited by plasma-enhanced atomic layer deposition from tri-methyl-aluminium and dioxygen precursors: Investigation of interfacial and structural properties

Autor: Emmanuel Scheid, Ahmet Lale, Pierre Temple-Boyer, Fuccio Cristiano, Jérôme Launay, Lucien Datas, Benjamin Reig

Publikováno v: Thin Solid Films
Thin Solid Films, Elsevier, 2018, 666, pp.20-27. ⟨10.1016/j.tsf.2018.09.028⟩
Thin Solid Films, Elsevier, 2018, 666, pp.20-27. 〈10.1016/j.tsf.2018.09.028〉
Thin Solid Films, 2018, 666, pp.20-27. ⟨10.1016/j.tsf.2018.09.028⟩

International audience; Aluminium oxide (Al 2 O 3) films were deposited on silicon substrates using plasma-enhanced atomic layer de-position (PE-ALD) technique with tri-methyl-aluminium TMA (Al(CH 3) 3) and dioxygen (O 2) as precursors. PE-ALD experi

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::3cfc89efc4db7b8789b22fb708a2bcef
https://doi.org/10.1016/j.tsf.2018.09.028

Design, realization and characterization of all-arround SiO2/Al2O3 gate, suspended silicon nanowire chemical field effect transistors

Autor: Auriane Grappin, Pierre Temple-Boyer, Ahmet Lale, Aurélie Lecestre, Jérôme Launay, Laurent Mazenq, David Bourrier

Publikováno v: 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017)
19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Jun 2017, Kaohsiung, Taiwan. 4p., ⟨10.1109/TRANSDUCERS.2017.7994346⟩

International audience; We present a sensor platform associated to silicon-nanowire chemical field effect transistors (Si-nw-ChemFET). Innovations concern the use of networks of suspended silicon N + /P/N + nanowires as conducting channel, the realiz

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::2ee7f5ba6e1c2fc779c9cad4f4d0dfe4
https://doi.org/10.1109/transducers.2017.7994346

Integration of tungsten layers for the mass fabrication of WO3-based pH-sensitive potentiometric microsensors

Autor: Pierre Temple-Boyer, Ludovic Salvagnac, Ahmet Lale, Jérôme Launay, Aurélie Civélas, Aliki Tsopela

Publikováno v: Sensors and Actuators B: Chemical
Sensors and Actuators B: Chemical, Elsevier, 2015, Sensors and Actuators B, 206, pp.152-158. ⟨10.1016/j.snb.2014.09.054⟩
Sensors and Actuators B: Chemical, 2015, Sensors and Actuators B, 206, pp.152-158. ⟨10.1016/j.snb.2014.09.054⟩
Sensors and Actuators B: Chemical, Elsevier, 2015, 206, pp.152-158. ⟨10.1016/j.snb.2014.09.054⟩

International audience; (W/WO3 –Ag/AgCl) and (Pt/IrO2 – Ag/AgCl) potentiometric microdevices were developed for pH measurement in liquid phase using a (Pt – Pt – Ag/AgCl) electrochemical microcells (ElecCell) silicon-based technological platf

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1d709fc375ed93c2e2da64586e2c6f24
https://hal.laas.fr/hal-01399777