Zobrazeno 1 - 8
of 8
pro vyhledávání: '"Aharon, Sharon"'
Autor:
Robinson, John C., Sendelbach, Matthew J., Levinski, Vladimir, Paskover, Yuri, Aharon, Sharon, Negri, Daria, Gutman, Nadav, Nireekshan Reddy, K., Lee, Jeongpyo, Spielberg, Hedvi, Lee, Dongyoung, Kim, Hyunjun, Park, Sukwon, Kim, Bohye, Jang, Hongseok, Lee, Honggoo, Lee, Sangho
Publikováno v:
Proceedings of SPIE; May 2022, Vol. 12053 Issue: 1 p120531Z-120531Z-8, 1084788p
Autor:
Minhyung Hong, Jieun Lee, Guy Ben-Dov, Young-Sik Kim, Eitan Hajaj, Seungyoung Kim, Yoonshik Kang, Dana Klein, Anna Golotsvan, Dongyoung Lee, Ahlin Choi, Saltoun Lilach, Eungryong Oh, Tal Marciano, Dan Serero, Kyuchan Shim, Sangjoon Han, Aharon Sharon, Honggoo Lee
Publikováno v:
Metrology, Inspection, and Process Control for Microlithography XXXII.
As semiconductor manufacturing technology progresses and the dimensions of integrated circuit elements shrink, overlay budget is accordingly being reduced. Overlay budget closely approaches the scale of measurement inaccuracies due to both optical im
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::d30078f3576a31d2bab23b91e8b33587
https://doi.org/10.1117/12.2300153
https://doi.org/10.1117/12.2300153
Autor:
Jungtae Lee, Bart Baudemprez, Dana Klein, Mark D. Smith, Dieter Vandenheuvel, Philippe Leray, Aharon Sharon, Evgeni Gurevich, Michael E. Adel, Chris A. Mack, Antonio Mani, Gronheid Roel
Publikováno v:
SPIE Proceedings.
In this publication the authors have investigated both theoretically and experimentally the link between line edge roughness, target noise and overlay mark fidelity. Based on previous worki , a model is presented to explain how any given edge of a pr
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::5681bb4d8020bbc6e47b592f351a424c
https://doi.org/10.1117/12.2258353
https://doi.org/10.1117/12.2258353
Akademický článek
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Autor:
Honggoo Lee, Yoonshik Kang, Sangjoon Han, Kyuchan Shim, Minhyung Hong, Seungyoung Kim, Jieun Lee, Dongyoung Lee, Eungryonh Oh, Ahlin Choi, Youngsik Kim, Marciano, Tal, Klein, Dana, Hajaj, Eitan M., Aharon, Sharon, Ben-Dov, Guy, Lilach, Saltoun, Serero, Dan, Golotsvan, Anna
Publikováno v:
Proceedings of SPIE; 2018, Vol. 10585, p1-12, 12p
Autor:
Levinski, Vladimir, Paskover, Yuri, Aharon, Sharon, Negri, Daria, Gutman, Nadav, Nireekshan Reddy, K., Lee, Jeongpyo, Spielberg, Hedvi, Lee, Dongyoung, Kim, Hyunjun, Park, Sukwon, Kim, Bohye, Jang, Hongseok, Lee, Honggoo, Lee, Sangho
Publikováno v:
Proceedings of SPIE; 1/20/2022, Vol. 12053, p120531Z-120531Z-8, 1p
Autor:
Ukraintsev, Vladimir A., Adan, Ofer, Lee, Honggoo, Kang, Yoonshik, Han, Sangjoon, Shim, Kyuchan, Hong, Minhyung, Kim, Seungyoung, Lee, Jieun, Lee, Dongyoung, Oh, Eungryong, Choi, Ahlin, Kim, Youngsik, Marciano, Tal, Klein, Dana, Hajaj, Eitan M., Aharon, Sharon, Ben-Dov, Guy, Lilach, Saltoun, Serero, Dan, Golotsvan, Anna
Publikováno v:
Proceedings of SPIE; March 2018, Vol. 10585 Issue: 1 p1058532-1058532-12
Autor:
Sanchez, Martha I., Ukraintsev, Vladimir A., Adel, Michael, Gronheid, Roel, Mack, Chris, Leray, Philippe, Gurevich, Evgeni, Baudemprez, Bart, Vandenheuvel, Dieter, Mani, Antonio, Aharon, Sharon, Klein, Dana, Lee, Jungtae, Smith, Mark D.
Publikováno v:
Proceedings of SPIE; March 2017, Vol. 10145 Issue: 1 p1014509-1014509-13