Zobrazeno 1 - 10
of 32
pro vyhledávání: '"Agnes Verbist"'
Autor:
L. Haspeslagh, Agnes Verbist, Ann Witvrouw, Simone Severi, Bert Du Bois, Lianggong Wen, Robert Puers, B. Wang, Shuji Tanaka, J. De Coster, Gert Claes, Hendrikus Tilmans, Guy Vereecke, Haris Osman, B. Guo, R Van Hoof, I. De Wolf, Stefaan Decoutere, Philippe Helin
Publikováno v:
Journal of Microelectromechanical Systems. 21:110-120
This paper presents an attractive poly-SiGe thin-film packaging and MEM (microelectromechanical) platform technology for the generic integration of various packaged MEM devices above standard CMOS. Hermetic packages with sizes up to 1 mm2 and differe
Autor:
Agnes Verbist, Bert Du Bois, Dries Van Thourhout, Ann Witvrouw, Jeroen De Coster, Rita Van Hoof, Haris Osman, Roel Beernaert, Herbert De Smet, George Bryce, Robert Puers, Simone Severi, Lianggong Wen, Luc Haspeslagh, S. Rudra
Publikováno v:
ECS Transactions. 33:799-812
In imec's 200mm fab a dedicated poly-SiGe above-IC MEMS (Micro Electro-Mechanical Systems) platform has been set up to integrate MEMS and its readout and driving electronics on one chip. In the Flemish project Gemini the possibilities of this platfor
Publikováno v:
Thin Solid Films. 516:6907-6911
Polycrystalline silicon (grain size ~ 0.1–100 μm) solar cells on foreign substrates are a promising approach for the next generation silicon solar cells. Aluminum-induced crystallization AIC in combination with epitaxy is a possible way to obtain
Autor:
B. Parmentier, Cristina Rusu, V. Leca, B. Otter, Franz Lärmer, Sherif Sedky, Agnes Verbist, Ann Witvrouw, Silvia Kronmüller, Olivier Richard, Frank Fischer, Bert Brijs, L. Geenen
Publikováno v:
Journal of microelectromechanical systems, 12(6), 816-825. IEEE
Thick poly-SiGe layers, deposited by plasma-enhanced chemical vapor deposition (PECVD), are very promising structural layers for use in microaccelerometers, microgyroscopes or for thin-film encapsulation, especially for applications where the thermal
Autor:
D. Maes, Kasper Baert, A. De Caussemaeker, P. De Moor, F. Van Steenkiste, B. Parmentier, P. Van Gerwen, A. de Vries, Agnes Verbist, L. Haspeslagh, Sherif Sedky, Ann Witvrouw, C. Van Hoof
Publikováno v:
Microsystem Technologies. 6:192-199
In many applications up to millions of sensors or actuators have to be interconnected to each other and/or to the outside world, making the monolithic integration of circuitry mandatory. This monolithic integration is also pursued for mass-produced t
Autor:
Kasper Baert, C. Van Hoof, Agnes Verbist, W. Belmans, Andreas Oberstedt, P. De Moor, Ludo Vanneste
Publikováno v:
Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 444:368-372
Specific experiments, from solid state to elementary particle physics, require use of high-resolution particle detection in magnetic fields. When carefully designed, low-temperature microcalorimeters provide excellent energy resolution and low thresh
Publikováno v:
Sensors and Actuators A: Physical. 66:193-199
This paper reports the first fabrication of surface-micromachined microbolometers made of polycrystalline silicon-germanium alloy (poly Si 0.7 Ge 0.3 ). The electrical and mechanical properties of this material have been measured and the effects of t
Publikováno v:
Journal of Micromechanics and Microengineering. 6:122-127
This paper reports on the first results of a study of the possibilities of the fabrication of micromechanical structures for microsystems applications in a regular MPC run of a standard CMOS process, followed by post-processing. Two post-processing m
Publikováno v:
Microsystem Technologies. 1:71-74
We present a micromachined IR detector based on the principle of a pneumatic cell and suited as an IR detector in a miniaturised gas sensor. The detector basically consists of a sealed cavity, in which the heat generated by absorbed IR light results
Publikováno v:
2012 13th International Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems.
Capacitive Micromachined Ultrasound Transducers (cMUTs) are recognized as key enablers for emerging applications of ultrasound waves in gaseous, liquid and solid-state media, from positioning/ranging to medical treatment, through actuation, levitatio