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pro vyhledávání: '"Adrien Broue"'
Autor:
Jean-François Le Neal, Jérémie Dhennin, Adrien Broue, David Veyrie, Xavier Lafontan, Francis Pressecq, Djemel Lellouchi
Publikováno v:
SPIE Proceedings.
Until now, the determination of the herm eticity of microelectronic packages is related to the MIL-STD-883 method 1014 which is based on the He leak detection method. But this method is no more suited for small packages due to the resolution limit of