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pro vyhledávání: '"Adriaan Roelof Van Zwol"'
Autor:
Arthur Brecht, Marco Hugo Petrus Moers, Kevin Cummings, Mark Zellenrath, Neil A. Beaudry, Rob Willekers, Adriaan Roelof Van Zwol, Wim de Boeij, Hans Van Der Laan
Publikováno v:
SPIE Proceedings.
ARTEMISTM (Aberration Ring Test Exposed at Multiple Illumination Settings) is a technique to determine in-situ, full-field, low and high order lens aberrations. In this paper we are analyzing the ARTEMISTM data of PAS5500/750TM DUV Step & Scan system
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_________::83886dd00b5338799bba0d907f0da945
https://doi.org/10.1117/12.435676
https://doi.org/10.1117/12.435676
