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Publikováno v:
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 41(4):043203. American Institute of Physics
We investigate the use of Low Energy Ion Scattering (LEIS) to characterize buried interfaces of ultra-thin films. LEIS spectra contain depth-resolved information in the so-called sub-surface signal. However, the exact correlation between the sub-surf
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::738733cd169b8ee0a9b2a9b24ab511bc
https://doi.org/10.1116/6.0002567
https://doi.org/10.1116/6.0002567
