Zobrazeno 1 - 2
of 2
pro vyhledávání: '"Adel Douahi"'
Autor:
Adel Douahi, Jan Dziuban, Christophe Gorecki, Vincent Giordano, L. Nieradko, Jean-Charles Beugnot, Marco Moraja
Publikováno v:
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2008, 7 (3), pp.033013. ⟨10.1117/1.2964288⟩
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2008, 7 (3), pp.033013. ⟨10.1117/1.2964288⟩
International audience; We describe the fabrication of wafer-scale alkali vapor cells based on silicon micromachining and anodic bonding. The principle of the proposed micromachined alkali cell is based on an extremely compact sealed vacuum cavity of
Externí odkaz:
https://explore.openaire.eu/search/publication?articleId=doi_dedup___::7f752b44b3d9fe5b21ba82a425fccc9c
https://hal.archives-ouvertes.fr/hal-00362766
https://hal.archives-ouvertes.fr/hal-00362766
Autor:
Lukasz Nieradko, Christophe Gorecki, Adel Douahi, Vincent Giordano, Jean Charles Beugnot, Jan Dziuban, Marco Moraja
Publikováno v:
Journal of Micro/Nanolithography, MEMS & MOEMS; Jul2008, Vol. 7 Issue 3, p33013-33013, 1p
