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pro vyhledávání: '"Adam S. Bernfeld"'
Autor:
Mureo Kaku, Charles Y. Chen, Nyrissa S. Rogado, Hoang Vi Tran, Michael T. Mocella, Adam S. Bernfeld, Roger H. French, Freida Van Roey, Eric Hendrickx, Doug J. Adelman, Rebekah A. Derryberry
Publikováno v:
Optical Microlithography XXI.
We have performed high-index immersion fluid studies to define the levels of both soluble and insoluble impurities present. These studies have also revealed the importance of process materials' purity in fluid contact. Fluid interactions with resist,