Zobrazeno 1 - 6
of 6
pro vyhledávání: '"Adam J. Monkowski"'
Publikováno v:
ECS Transactions. 3:493-501
Arrays of nanostructured titania (NST) sensing elements have been fabricated on the wafer scale using standard microfabrication techniques. Sensing elements are 20 µm on a side and formed by the oxidation of titanium thin films in aqueous hydrogen p
Autor:
Adam J. Monkowski, Glenn E. Beltz
Publikováno v:
International Journal of Solids and Structures. 42:581-590
A strategy is proposed to reduce surface tensile stresses that develop in ceramic microlaminate structures. As a specific example, surface stresses, which can lead to unwanted edge cracking, appear within a thin alumina/mullite layer bounded by thick
Publikováno v:
Lab on a chip. 13(12)
A novel wicking material using nanostructured titania grown on high aspect ratio titanium micropillars is demonstrated. High aspect ratio titanium micropillars were micromachined from bulk titanium sheets. Nanostructured titania was then grown on the
Publikováno v:
2011 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.
This paper presents a new type of control scheme and device for controlling gas flow into semiconductor process chambers. The key component of the Gas Flow Controller (GFC) is a high-precision valve with an integrated position sensor, which is used t
Publikováno v:
Nanotechnology. 24:245304
Microstructured titanium (Ti) surfaces often suffer from poor hydrophilicity which makes the realization of open microfluidic devices difficult. Here, we investigate the effect of a superficial porous titania (TiO2) layer on the hydrophilicity of mic
Publikováno v:
ECS Meeting Abstracts. :119-119
not Available.