The planar Multipole Resonance Probe: a functional analytic approach

Autor: M. Friedrichs, J. Oberrath

Publikováno v: EPJ Techniques and Instrumentation, Vol 5, Iss 1, Pp 1-15 (2018)

Abstract Active Plasma Resonance Spectroscopy (APRS) is a well known diagnostic method, where a radio frequency probe is immersed into a plasma and excites plasma oscillations. The response of the plasma is recorded as frequency dependent spectrum, i

Externí odkaz: https://doaj.org/article/a690b5f7d2a34ce78bf96a65575c69e5

Planar multipole resonance probe:Comparison of full-wave electromagnetic simulation and electrostatic approximation

Autor: Friedrichs, Michael, Pohle, Dennis, Rolfes, Ilona, Oberrath, Jens

Publikováno v: Friedrichs, M, Pohle, D, Rolfes, I & Oberrath, J 2019, Planar multipole resonance probe : Comparison of full-wave electromagnetic simulation and electrostatic approximation . in 2019 Kleinheubach Conference, KHB 2019 ., 8890211, 2019 Kleinheubach Conference, KHB 2019, IEEE-Institute of Electrical and Electronics Engineers Inc., Piscataway, Kleinheubach Conference-KHB 2019, Miltenberg, Germany, 23.09.19 . < https://ieeexplore.ieee.org/document/8890211/authors#authors >

The diagnostic of inner plasma parameters during industrial processing is still a challenge. The planar multipole resonance probe (pMRP) is a promising candidate for this purpose. It can be integrated into the chamber wall and is thus minimally invas

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=od______3697::85b4386e484088747c37ebd9bfc27595
https://ieeexplore.ieee.org/document/8890211

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Influence of kinetic effects on the spectrum of a parallel electrode probe

Autor: Jens Oberrath, Ralf Peter Brinkmann

Publikováno v: Oberrath, J & Brinkmann, R P 2016, ' Influence of kinetic effects on the spectrum of a parallel electrode probe ', Plasma Sources Science and Technology, vol. 25, no. 6, 065020, pp. 1-16 . https://doi.org/10.1088/0963-0252/25/6/065020
Oberrath, J & Brinkmann, R P 2016, ' Influence of kinetic effects on the spectrum of a parallel electrode probe ' Plasma Sources Science and Technology, vol 25, no. 6, pp. 1-16 . DOI: 10.1088/0963-0252/25/6/065020

Active plasma resonance spectroscopy (APRS) denotes a class of diagnostic techniques which utilize the natural ability of plasmas to resonate on or near the electron plasma frequency ${{\omega}_{\text{p}}}$ . One particular class of APRS can be descr

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::1568ad3806581ee659755928cc9c8806
http://www.scopus.com/inward/record.url?scp=85003876054&partnerID=8YFLogxK

Active plasma resonance spectroscopy: Eigenfunction solutions in spherical geometry

Autor: Jens Oberrath, Ralf Peter Brinkmann

Publikováno v: Oberrath, J & Brinkmann, R P 2014, ' Active plasma resonance spectroscopy: Eigenfunction solutions in spherical geometry ' Plasma Sources Science and Technology, vol 23, no. 6, 065025 . DOI: 10.1088/0963-0252/23/6/065025
Oberrath, J & Brinkmann, R P 2014, ' Active plasma resonance spectroscopy: Eigenfunction solutions in spherical geometry ', Plasma Sources Science and Technology, vol. 23, no. 6, 065025 . https://doi.org/10.1088/0963-0252/23/6/065025

The term active plasma resonance spectroscopy denotes a class of related techniques which utilize, for diagnostic purposes, the natural ability of plasmas to resonate on or near the electron plasma frequency ωpe: a radio frequent signal (in the GHz

Externí odkaz: https://explore.openaire.eu/search/publication?articleId=doi_dedup___::27c590a17a83eda10906a4fbc00ea2c8
http://fox.leuphana.de/portal/de/publications/active-plasma-resonance-spectroscopy-eigenfunction-solutions-in-spherical-geometry(554d5705-3b7d-4967-8d15-aa823d1ed69b).html