Zobrazeno 1 - 5
of 5
pro vyhledávání: '"Ackel, Robin"'
Autor:
Thiel, Carey, Racette, Kenneth C., Fisch, Emily, Lawliss, Mark, Kindt, Louis, Huang, Chester, Ackel, Robin, Levy, Max
Publikováno v:
Proceedings of SPIE; Nov2003, Issue 1, p339-346, 8p
Status of fabrication of square-format masks for extreme-ultraviolet lithography (EUVL) at the MCoC.
Autor:
Racette, Kenneth C., Williams, Carey T., Fisch, Emily, Kindt, Louis, Lawliss, Mark, Ackel, Robin, Lercel, Michael J.
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p161-172, 12p
Autor:
Lercel, Michael J., Williams, Carey T., Lawliss, Mark, Ackel, Robin, Kindt, Louis, Fisch, Emily
Publikováno v:
Proceedings of SPIE; Nov2002, Issue 1, p790-798, 9p
Autor:
Magg, Christopher, Lercel, Michael J., Lawliss, Mark, Ackel, Robin, Caldwell, Neal, Kindt, Louis, Racette, Kenneth C., Williams, Carey T., Reu, Phillip L.
Publikováno v:
Proceedings of SPIE; Nov2001, Issue 1, p374-382, 9p
Autor:
Lercel, Michael, Magg, Christopher, Lawliss, Mark, Williams, Carey, Caldwell, Neal, Ackel, Robin, Kindt, Louis, Racette, Kenneth, Reu, Phillip, Engelstad, Roxann, Mackay, R. Scott
Publikováno v:
Journal of Vacuum Science & Technology: Part B-Microelectronics & Nanometer Structures; 2001, Vol. 19 Issue 6, p2671-2677, 7p